Features

  • 2D detail visibility of up to 150 nm with new water-cooled 190 kV transmission tube
  • Temperature stability with granite-based manipulation
  • Innovative and intuitive Geminy graphical user interface with touchscreen operation for quick inspection
  • Application flexibility using trajectories such as helical CT scan, horizontal field-of-view extension, virtual rotation axis, and standard Quick/QualityScan
  • FF20- Precise metrology MPESD = 3,9 µm + L/75, measured as a deviation of sphere distance referring to VDI 2630-1.3
  • FF35- Precise metrology MPESD = 5.9 µm + L/75, measured as a deviation of sphere distance referring to VDI 2630-1.3

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